Image-Based Wafer Navigation
.
Image-Based Wafer Navigation.
IEEE Trans. On Semiconductor Manufacturing, 17(3):432-443, 2004
Online Version
A pdf version is available for download.
Abstract
Microscopic imaging is used in most core technology processes where integrated circuit (IC) digital images reveal important information. We present a new method for navigation on wafers that is based on localization of microscopic eye-point images using a previously acquired wafer map. It is fast enough for in-line microscopy and robust to visual changes occurring during the manufacturing process, such as contrast variation, rescaling, rotation, and partial feature obliteration. The method uses geometric hashing, a highly efficient technique drawn from the object recognition field. This approach proved to be highly reliable when tested on typical wafer images.
Co-authors
Bibtex Entry
@article{RivlinLRAG04a,
title = {Image-Based Wafer Navigation},
author = {Ehud Rivlin and Michael Lifshits and Michael Rudzsky and Mike Adel and Roman Goldenberg},
year = {2004},
month = {August},
journal = {IEEE Trans. On Semiconductor Manufacturing},
volume = {17},
number = {3},
pages = {432-443},
abstract = {Microscopic imaging is used in most core technology processes where integrated circuit (IC) digital images reveal important information. We present a new method for navigation on wafers that is based on localization of microscopic eye-point images using a previously acquired wafer map. It is fast enough for in-line microscopy and robust to visual changes occurring during the manufacturing process, such as contrast variation, rescaling, rotation, and partial feature obliteration. The method uses geometric hashing, a highly efficient technique drawn from the object recognition field. This approach proved to be highly reliable when tested on typical wafer images.}
}