Image-Based Navigation on A Chip
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Image-Based Navigation on a Chip.
In Instrumentation and Measurement Technology Conference, 2004. IMTC 04., 1:504--509, 2004
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Abstract
In semiconductor industry, where highest levels of precision and robustness are required, machine vision tools evolved to become a mainstream automation tools that guide robotic handling, assembly and inspection processes. This paper presents an algorithm for navigation on a chip that is based on localization of microscopic eye-point images using a previously acquired wafer map. It is fast enough for in-line microscopy and robust to visual changes occurring during the manufacturing process, such as contrast variations, re-scaling, rotation and partial feature obliteration. The algorithm uses geometric hashing, a highly efficient technique drawn from the object recognition field. Experimental results indicate high reliability of the algorithm.
Co-authors
Bibtex Entry
@inproceedings{LifshitsRR04i,
title = {Image-Based Navigation on a Chip},
author = {Michael Lifshits and Ehud Rivlin and Michael Rudzsky},
year = {2004},
booktitle = {Instrumentation and Measurement Technology Conference, 2004. IMTC 04.},
volume = {1},
pages = {504--509},
abstract = {In semiconductor industry, where highest levels of precision and robustness are required, machine vision tools evolved to become a mainstream automation tools that guide robotic handling, assembly and inspection processes. This paper presents an algorithm for navigation on a chip that is based on localization of microscopic eye-point images using a previously acquired wafer map. It is fast enough for in-line microscopy and robust to visual changes occurring during the manufacturing process, such as contrast variations, re-scaling, rotation and partial feature obliteration. The algorithm uses geometric hashing, a highly efficient technique drawn from the object recognition field. Experimental results indicate high reliability of the algorithm.}
}